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JEOL 4200 Atomic Force Microscope (AFM)

Atomic resolution
Scanning Probe Microscope (SPM)/AFM
Scanner - 10 µm XY, 3 µm Z
Tunnel current - 30 pA - 1 uA
Probe - Silicon and Si Nitride
Sample size - 50 mm square, maximum
Gas injection/discharge, vacuum operation capable